On-axis dynamic interferometer and optical imaging systems employing the same
US11262191B1 · kind B1 · utility
2Cited by
43References
24Claims
0Family size
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Key dates
| Filing date | Jul 11, 2019 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Jul 11, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical device for characterizing a workpiece combines an interferometer with a polarization rotation pellicle, installed in a stand-alone fashion in a spatial gap between the mirrors of the interferometer, and a polarization based phase-shift sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.