Patent · US Active

Apparatus and method for examining and/or processing a sample

US11262378B2 · kind B2 · utility

0Cited by

8References

12Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Christof Baur · Darmstadt, DE
Michael Budach · Hanau, DE

Key dates

Filing date	Dec 21, 2020
Grant date	Mar 1, 2022
Priority date	—
Expiry date	Dec 21, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2583
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The present invention relates to an apparatus for examining and/or processing a sample, said apparatus comprising: (a) a scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; and (b) a scanning probe microscope with a deflectable probe; (c) wherein a detection structure is attached to the deflectable probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.