Substrate transport apparatus
US11273558B2 · kind B2 · utility
2Cited by
5References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 16, 2015 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Mar 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.