Brooks Automation US, LLC
61Patents
61Active
61Granted
63Portfolio score
Filing activity: Jun 17, 2010 → Feb 6, 2024 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11476139B2 | Substrate process apparatus | Electricity | 4 | Active |
| US11273558B2 | Substrate transport apparatus | Electricity | 2 | Active |
| US11508597B2 | High speed substrate aligner apparatus | Electricity | 1 | Active |
| US11862498B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US11426865B2 | Substrate transport apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US11545380B2 | Transport apparatus with linear bearing | Electricity | 1 | Active |
| US12002696B2 | Substrate mapping apparatus and method therefor | Physics | 1 | Active |
| US11764093B2 | Automatic wafer centering method and apparatus | Electricity | 1 | Active |
| US11276598B2 | Substrate transport apparatus | Electricity | 1 | Active |
| US11270904B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US11444521B2 | Sealed switched reluctance motor | Electricity | 1 | Active |
| US11772261B2 | Compact direct drive spindle | Emerging Cross-Sectional Technologies | 0 | Active |
| US11469126B2 | Tool auto-teach method and apparatus | Electricity | 0 | Active |
| US12266554B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11972965B2 | Method and apparatus for substrate transport apparatus position compensation | Electricity | 0 | Active |
| US11978651B2 | Substrate transport apparatus | Electricity | 0 | Active |
| US11676845B2 | Automated teach apparatus for robotic systems and method therefor | Physics | 0 | Active |
| US11443962B2 | Integrated handling system for semiconductor articles | Electricity | 0 | Active |
| US11295975B2 | Method and apparatus for substrate alignment | Electricity | 0 | Active |
| US11664259B2 | Process apparatus with on-the-fly substrate centering | Emerging Cross-Sectional Technologies | 0 | Active |
| US12162698B2 | Substrate transport apparatus | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11404939B2 | Position feedback for sealed environments | Electricity | 0 | Active |
| US11830749B2 | Substrate transport apparatus | Electricity | 0 | Active |
| US11894252B2 | Substrate transport apparatus | Electricity | 0 | Active |
| US12300528B2 | Substrate transport apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.