Patent · US Active

Measuring assembly for the frequency-based determination of the position of a component

US11274914B2 · kind B2 · utility

0Cited by

7References

22Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Matthias Manger · Neukochen, DE
Andreas Koeniger · Aalen, DE
Alexander Vogler · Aalen, DE

Key dates

Filing date	Nov 24, 2020
Grant date	Mar 15, 2022
Priority date	—
Expiry date	Nov 24, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring assembly for the frequency-based determination of the position of a component, in particular in an optical system for microlithography, includes at least one optical resonator, which has a stationary first resonator mirror, a movable measurement target assigned to the component, and a stationary second resonator mirror. The second resonator mirror is formed by an inverting mirror (130, 330, 430, 530), which reflects back on itself a measurement beam coming from the measurement target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.