Patent · US Active

Photoacoustic sensor valve

US11275057B2 · kind B2 · utility

0Cited by

11References

12Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Johannes Manz · Munich, DE
Wolfgang Klein · Zorneding, DE
David Tumpold · Tauberbischofsheim, DE

Key dates

Filing date	Apr 3, 2019
Grant date	Mar 15, 2022
Priority date	—
Expiry date	Mar 24, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/02809
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.