Substrate transport apparatus
US11276598B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 18, 2020 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Aug 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67748
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with a coaxial shaft spindle, at least one interchangeable composite motor module of more than one different interchangeable motor modules arranged in a series, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module at least one of the motor modules is selectable, for coupling to the coaxial shaft spindle, from other different interchangeable composite motor modules, each having a different predetermined characteristic, independent of coupling to the coaxial shaft spindle, that defines a different predetermined drive characteristic of one or more of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one composite motor module determines the different predetermined drive characteristic of the coaxial shaft spindle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.