Patent · US Active

Immersion set and method for retrofitting an immersion objective with an immersion set

US11280993B2 · kind B2 · utility

0Cited by

8References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Johannes Knoblich · Jena, DE
Ingo Fahlbusch · Göttingen, DE
Markus Sticker · Jena, DE
Ralf Wolleschensky · Jena, DE
Thomas Ohrt · Golmsdorf, DE

Key dates

Filing date	Apr 26, 2021
Grant date	Mar 22, 2022
Priority date	—
Expiry date	Apr 26, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/361
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An immersion set for retrofitting an immersion objective comprises at least one immersion fluid tank, at least one pump fluidly connected to the immersion fluid tank, and a control electronics unit configured at least to control the pump. A fastening device is configured to realize the load-bearing fastening of the at least one immersion fluid tank, the at least one pump and the control electronics unit on the immersion objective or on a mounting adapter for the immersion objective.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.