Methods using fingerprint and evolution analysis
US11281110B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2019 |
| Grant date | Mar 22, 2022 |
| Priority date | — |
| Expiry date | May 20, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0275
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of determining a sampling control scheme and/or a processing control scheme for substrates processed by a device. The method uses a fingerprint model and an evolution model to generate the control scheme. The fingerprint model is based on fingerprint data for a processing parameter of at least one substrate processed by a device, and the evolution model represents variation of the fingerprint data over time. The fingerprint model and the evolution model are analyzed and a sampling and/or processing control scheme is generated using the analysis. The sampling control scheme provides an indication for where and when to take measurements on substrates processed by the device. The processing control scheme provides an indication for how to control the processing of the substrate. Also, there is provided a method of determining which of multiple devices contributed to a fingerprint of a processing parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.