Method and device for inspecting a surface of an object comprising nonsimilar materials
US11287246B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 25, 2019 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Jan 25, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and related device for measuring the profile of a surface of an object to be measured having zones made from at least two different materials, the object to be measured forming part of a plurality of substantially identical objects, the plurality of objects also including at least one reference object having at least one reference surface, the method including the following steps: determining a correction function, from a first profile signal of a first reference surface and a second profile signal from a second reference surface, the second reference surface being metallized; acquiring a profile signal from the surface of the object to be measured; and applying the correction function to the profile signal from the surface of the object to be measured to obtain a corrected profile signal; the profile signals being obtained from interferometric measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.