Method for measuring secondary electron emission coefficient
US11287392B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 23, 2020 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Nov 27, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/07
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring secondary electron emission coefficient comprising: providing a device including a first collecting plate and a second collecting plate, and measuring an injection current. Short-circuiting the first collecting plate and the second collecting plate; placing a sample and applying a 50 volt positive voltage between the sample and the first collecting plate, ISE is 0; measuring a current I1 between the sample and the first collecting plate, and ignoring IBG1; and according to formula I1=IBG1+Iothers+ISE, obtaining a current of other electrons. Applying a positive voltage between the first collecting plate and the sample; measuring a current I2 between the first collecting plate and the sample, and ignoring IBG2; and obtaining ISE formed by the secondary electrons according to formula I2=IBG2+Iothers+ISE. Obtaining the secondary electron emission coefficient according to formula
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.