Microscope and observation method
US11287625B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2020 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Jul 17, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/6458
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To acquire an image of a sample. A microscope includes: an illumination optical system that includes a light flux splitter that splits light from a light source into a plurality of light fluxes, and scans a sample in a plurality of directions with interference fringes generated by interference of at least part of the light fluxes split by the light flux splitter; a detection optical system on which light from the sample is incident; a detection device that includes a plurality of detectors that detect the light from the sample via the detection optical system; and an image processor that generates an image using detection results of two or more of the detectors of the detection device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.