Patent · US Active

Semiconductor device

US11289572B1 · kind B1 · utility

1Cited by
1References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 23, 2020
Grant dateMar 29, 2022
Priority date
Expiry dateNov 23, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/017

Abstract

A semiconductor device includes a substrate having a logic region and a high-voltage (HV) region, a first gate structure on the HV region, a first epitaxial layer and a second epitaxial layer adjacent to one side of the first gate structure, a first contact plug between the first epitaxial layer and the second epitaxial layer, a third epitaxial layer and a fourth epitaxial layer adjacent to another side of the first gate structure, and a second contact plug between the third epitaxial layer and the fourth epitaxial layer. Preferably, a bottom surface of the first epitaxial layer is lower than a bottom surface of the first contact plug and a bottom surface of the third epitaxial layer is lower than a bottom surface of the second contact plug.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.