MEMS device with suspension structure and method of making a MEMS device

US11300778B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Stephan Gerhard Albert · Munich, DE
• Franz Michael Darrer · Graz, AT
• Marcus Hennecke · Ulm, DE
• Hendrikus Van Lierop · Weert, NL

Key dates

• Filing date: May 17, 2019
• Grant date: Apr 12, 2022
• Expiry date: Feb 17, 2040

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0163
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.