Patent · US Active

Polarizer

US11304286B2 · kind B2 · utility

0Cited by

4References

15Claims

0Family size

Assignee

TRUMPF Lasersystems for Semiconductor Manufacturing GmbH · DE

Inventor

Tolga Ergin · Bietigheim-Bissingen, DE

Key dates

Filing date	Jan 10, 2020
Grant date	Apr 12, 2022
Priority date	—
Expiry date	Jul 18, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/005
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A polarizer arrangement for polarizing a laser beam includes: multiple plate-shaped optical elements which are arranged in a beam path of the laser beam and each of which includes a beam entry surface for the laser beam and a beam exit surface for the laser beam, in which the beam entry surface of a respective plate-shaped optical element is oriented at the Brewster angle relative to the laser beam. The beam entry surfaces and the beam exit surfaces of the plate-shaped optical elements are in each case oriented at least at one wedge angle relative to one another. An EUV radiation generating device may include such a polarizer arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.