Tolga Ergin
6Patents
1h-index
16Co-inventors
40Inventor score
Filing activity: Jul 21, 2017 → Apr 24, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10327318B2 | Adjusting a beam diameter and an aperture angle of a laser beam | Physics | 2 | Active |
| US12007693B2 | Laser focussing module | Electricity | 0 | Active |
| US11304286B2 | Polarizer | Electricity | 0 | Active |
| US12171054B2 | EUV light source with a beam positioning device | Physics | 0 | Active |
| US11835699B2 | Focusing device and EUV radiation generating device having same | Electricity | 0 | Active |
| US11675202B2 | Reflective optical element, beam guiding device and EUV-beam generating device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.