Patent · US Active

MEMS nanoindenter chip with indenter probe and reference probe

US11307125B2 · kind B2 · utility

0Cited by

5References

13Claims

0Family size

Assignee

Femto Tools AG · CH

Inventors

David Beyeler · Wallisellen, CH
Simon Muntwyler · Sheung Shui, CN
Felix Beyeler · Regensdorf, CH

Key dates

Filing date	Nov 20, 2018
Grant date	Apr 19, 2022
Priority date	—
Expiry date	Jan 14, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01N2203/0286
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A MEMS-nanoindenter chip performs nanoindentation on a specimen. The MEMS-nanoindenter chip has an intender probe joined with an indenter tip. The indenter tip indents into the specimen. A reference probe is joined with a reference tip, the reference tip touches the specimen. Sensing capabilities are provided to measure the position of the indenter probe relative to the reference probe. The MEMS-nanoindenter chip enables highly accurate measurements since the frame stiffness is not part of the measurement chain any more. Furthermore, thermal drift during the nanoindentation is considerably reduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.