Automatic optimization of an examination recipe
US11307150B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 17, 2020 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Aug 17, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a system and method of automatic optimization of an examination recipe. The method includes obtaining one or more inspection images each representative of at least a portion of the semiconductor specimen, the one or more inspection images being indicative of respective defect candidates selected from a defect map using a first classifier included in the examination recipe; obtaining label data respectively associated with the one or more inspection images and informative of types of the respective defect candidates; extracting inspection features characterizing the one or more inspection images; retraining the first classifier using the first features and the label data, giving rise to a second classifier; and optimizing the examination recipe by replacing the first classifier with the second classifier; wherein the optimized examination recipe is usable for examining a subsequent semiconductor specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.