Device for measuring secondary electron emission coefficient
US11307156B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 23, 2020 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Oct 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/507
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for measuring a secondary electron emission coefficient comprises a scanning electron microscope, a first collecting plate, a second collecting plate, a first galvanometer, a second galvanometer, a voltmeter, and a Faraday cup. The scanning electron microscope comprises an electron emitter and a chamber. A sample is located between the first collecting plate and the second collecting plate. The first galvanometer is used to test a current intensity of electrons escaping from the sample and hitting the first collecting plate and the second collecting plate. A high-energy electron beam emitted by the electron emitter passes through the first collecting plate and the second collecting plate, and enters the Faraday cup. The second galvanometer is used to test a current intensity of electrons entering the Faraday cup.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.