Synchronization of microelectromechanical system (MEMS) mirrors
US11307403B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2019 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Mar 6, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.