Apparatus and method for contamination identification
US11311917B2 · kind B2 · utility
1Cited by
39References
13Claims
0Family size
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Key dates
| Filing date | Jan 6, 2017 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Jan 6, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Method and apparatus for identifying a contaminant on a substrate. Identification of a contaminant removed from a substrate can be useful in identifying and eliminating or reducing the source of the contamination and tailoring the removal method to minimize the potential for substrate damage. The methods and apparatus for identification of the contaminant provide liberation of molecules of the contaminant from the surface of the substrate, accounting for different geometries and substrate materials, sample preparation, and chemical analysis of the contaminant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.