Spring-loaded fastening system for process chamber liners
US11313404B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 23, 2019 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Nov 12, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0213
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A spring-loaded fastening system for fastening a liner to a structure, including a spring-loaded fastener with a cleat defining an interior cavity, a spring element disposed on a floor of the interior cavity, and a shoulder bolt with head portion disposed on the spring element, with a shoulder portion of the shoulder bolt extending through a mounting aperture in a floor of the interior cavity and a threaded portion of the shoulder bolt fastened to the structure. The system further includes a hanger pocket in a rear surface of the liner including a first portion with an opening large enough to accommodate a diameter of a lower portion of the cleat and not large enough to accommodate a diameter of an upper portion of the cleat, and a second portion adjoining the first portion with an opening large enough to accommodate the diameter of the upper portion of the cleat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.