Pressure sensor device and method for forming a pressure sensor device
US11313749B2 · kind B2 · utility
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3References
9Claims
0Family size
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Key dates
| Filing date | Oct 2, 2017 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Sep 30, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an embodiment a pressure sensor device includes a substrate body, a pressure sensor having a membrane and a cap body having at least one opening, wherein the pressure sensor is arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, and wherein the mass of the substrate body amounts to at least 80% of the mass of the cap body and at most 120% of the mass of the cap body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.