Device and method for detecting electron beam
US11320547B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 8, 2021 |
| Grant date | May 3, 2022 |
| Priority date | — |
| Expiry date | Apr 8, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T7/00
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An device for detecting electron beam comprises a porous carbon material layer, a Faraday cup and an image display. The porous carbon material layer comprises a plurality of carbon material particles and a first through hole. A plurality of micro gaps exist between the plurality of carbon material particles. A cross-sectional area of the first through hole is less than or equal to a cross-sectional area of the electron beam. The Faraday cup is under the porous carbon material layer and comprises an opening. The opening and the first through hole penetrate with each other. The image display is electrically connected to the porous carbon material layer and configured to form an image with different colors according to charge generated in the porous carbon material layer. A method for detecting electron beam using the device for detecting electron beam is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.