Liquid crystalline elastomer for pick and place of semiconductor devices
US11328942B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2019 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Nov 13, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/01
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pick-up head assembly comprises a body of a liquid crystalline elastomer (LCE) that undergoes a reversible expansion when exposed to a first frequency of light and contracts when exposed to a second frequency of light. Selective portions of the LCE in the pick-up head assembly are irradiated with the first frequency to cause an expansion in the selective portions. The adhesive forces of the expanded portions of the LCE are used to pick-up semiconductor devices from a first substrate. The semiconductor devices are placed on a second substrate by exposing the expanded portions of the LCE to the second frequency of light, causing the expanded portions to contract.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.