Patent · US Active

Field-effect transistor and method for fabricating the same

US11329161B2 · kind B2 · utility

0Cited by
2References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 19, 2020
Grant dateMay 10, 2022
Priority date
Expiry dateJun 19, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/038
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A structure of field-effect transistor includes a silicon layer of a silicon-on-insulator structure. A gate structure layer in a line shape is disposed on the silicon layer, wherein the gate structure layer includes a first region and a second region abutting to the first region. Trench isolation structures in the silicon layer are disposed at two sides of the gate structure layer, corresponding to the second region. The second region of the gate structure layer is disposed on the silicon layer and overlaps with the trench isolation structure. A source region and a drain region are disposed in the silicon layer at the two sides of the gate structure layer, corresponding to the first region. The second region of the gate structure layer includes a conductive-type junction portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.