Patent · US Active

Gas cushion apparatus and techniques for substrate coating

US11338319B2 · kind B2 · utility

0Cited by
149References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 28, 2019
Grant dateMay 24, 2022
Priority date
Expiry dateAug 28, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K3/0091
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of forming a material layer on a substrate comprises loading a substrate into a printing zone of a coating system using a substrate handler, printing an organic ink material on a substrate while the substrate is located in the printing zone, transferring the substrate from the printing zone to a treatment zone of the coating system, treating the organic ink material deposited on the substrate in the treatment zone to form a film layer on the substrate, and removing the substrate from the treatment zone using the substrate handler.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.