Patent · US Active

Operating a particle beam apparatus and/or a light microscope

US11347043B2 · kind B2 · utility

0Cited by

2References

26Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Andreas Schmaunz · Oberkochen, DE
Gero Walter · Lauchheim, DE
Stephan Hiller · Königsbronn, DE

Key dates

Filing date	Oct 29, 2020
Grant date	May 31, 2022
Priority date	—
Expiry date	Oct 29, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH02P8/40
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A particle beam apparatus and/or a light microscope is operated. A first temperature of an object may be changed, where the object may be arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object may alter a second temperature of the object-receiving device from a first temperature value to a second temperature value. The supply current of the motor may be changed from a first current value to a second current value, where the supply current is designed to hold the object-receiving device in position, and a temperature of the object-receiving device may be changed from the second temperature value to a third temperature value on account of heat generated by the motor, which may be obtained by the second current value of the supply current and fed to the object receiving device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.