Patent · US Active

Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope

US11353478B2 · kind B2 · utility

0Cited by

4References

28Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Gabriel Baralia · Darmstadt, DE
Rainer Becker · Pfungstadt, DE
Kinga Kornilov · Roßdorf, DE
Christof Baur · Darmstadt, DE
Hans Hermann Pieper · Darmstadt, DE

Key dates

Filing date	May 28, 2019
Grant date	Jun 7, 2022
Priority date	—
Expiry date	Feb 2, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3174
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.