High resolution radiation sensor based on single polysilicon floating gate array
US11353597B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2020 |
| Grant date | Jun 7, 2022 |
| Priority date | — |
| Expiry date | Jan 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/334
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A method for radiation dosage measurement includes: (1) exposing a plurality of single-poly floating gate sensor cells to radiation; (2) measuring threshold voltage differences between logical pairs of the exposed sensor cells using differential read operations, wherein the sensor cells of each logical pair are separated by a distance large enough that radiation impinging on one of the sensor cells does not influence the other sensor cell; (3) determining whether each logical pair of exposed sensor cells is influenced by exposure to the radiation in response to the corresponding measured threshold voltage difference; and (4) determining a dosage of the radiation in response to the number of logical pairs of the exposed sensor cells determined to be influenced by exposure to the radiation. A non-radiation influenced threshold voltage shift may be measured and used in determining whether each logical pair of exposed sensor cells is influenced by radiation exposure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.