Transport system having a magnetically levitated transportation stage
US11360400B2 · kind B2 · utility
2Cited by
4References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 21, 2018 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | May 9, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/033
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.