Conveyance system
US11365062B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 22, 2019 |
| Grant date | Jun 21, 2022 |
| Priority date | — |
| Expiry date | Mar 11, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2207/30
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a conveyance system that conveys a workpiece to each of plural processing apparatuses. The conveyance system includes a conveyance passage, an automated workpiece conveying vehicle that travels on the conveyance passage, a stock unit, and a control unit. The conveyance passage is set in a space directly above the processing apparatus across the plural processing apparatus. The stock unit includes a placement base on which a workpiece stocker capable of housing plural workpieces is placed, two temporary putting bases on which the workpiece carried out from the workpiece stocker on the placement base is temporarily put, a temporary putting base movement part that moves the two temporary putting bases in such a manner as to interchange the two temporary putting bases between a first position that faces the placement base and a second position adjacent to the first position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.