Patent · US Active

Silane compound

US11365350B2 · kind B2 · utility

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1References
2Claims
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Key dates

Filing dateAug 18, 2020
Grant dateJun 21, 2022
Priority date—
Expiry dateSep 27, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/31111
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

An etchant composition includes a silane compound represented by the following Chemical Formula 1:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.