Method for determining the thickness and refractive index of a layer using a shape feature during analysis

US11371831B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Nils Langholz · Apolda, DE
• Jakob Haarstrich · Jena, DE

Key dates

• Filing date: Jul 17, 2019
• Grant date: Jun 28, 2022
• Expiry date: Jul 26, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0024
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26). In said method, the following steps are performed; imaging the layer (6), by confocal microscopy, along an optical axis (8), determining a point spread function resolved along the optical axis (8) al the layer boundary surface (30) and the layer lop side (28), determining an apparent thickness of the layer at a lateral point of the layer from the distance between two maxima of the point spread function, determining the widening of a maximum that the point spread function has at the layer boundary surface (30) relative to the width of the same maximum that the point spread function has at the layer top side (28), at the lateral point, and determining the thickness and refractive index of the layer (6) at the lateral point from the apparent thickness and the widening.