Secondary electron probe and secondary electron detector
US11373841B1 · kind B1 · utility
0Cited by
11References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 8, 2021 |
| Grant date | Jun 28, 2022 |
| Priority date | — |
| Expiry date | Apr 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2448
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A secondary electron probe is provided. The secondary electron probe comprises a porous carbon material layer. The porous carbon material layer consists of a plurality of carbon material particles and a plurality of micro gaps, the plurality of micro gaps are located between the plurality of carbon material particles. The porous carbon material layer is an electronic blackbody. A secondary electron detector and a scanning electron microscope probe using the secondary electron probe are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.