Systems and methods for repetitive tuning of matching networks
US11373844B2 · kind B2 · utility
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143References
20Claims
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Key dates
| Filing date | Sep 28, 2020 |
| Grant date | Jun 28, 2022 |
| Priority date | — |
| Expiry date | Sep 28, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for repetitive tuning of a matching network in a radio frequency plasma processing device, the method including detecting a condition within the matching network and determining if the condition is a known condition for the matching network. Also, finding a prior solution and to the condition when the condition is the known condition for the matching network; and replicating the prior solution for the condition in the matching network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.