Patent assignee · US · COMPANY

COMET TECHNOLOGIES USA, INC.

34Patents
34Active
34Granted
65Portfolio score

Filing activity: Oct 20, 2010 → Oct 11, 2023

Most-cited patents

PatentTitleAreaCited byStatus
US8779662B2 Pulse mode capability for operation of an RF/VHF impedance matching network with 4 quadrant, VRMS/IRMS responding detector circuitry Electricity 30 Active
US9171700B2 Plasma pulse tracking system and method Electricity 30 Active
US8803424B2 RF/VHF impedance matching, 4 quadrant, dual directional coupler with V RMS/IRMS responding detector circuitry Electricity 29 Active
US8491759B2 RF impedance matching network with secondary frequency and sub-harmonic variant Electricity 28 Active
US8928229B2 Pulse mode capability for operation of an RF/VHF impedance matching network with a 4 quadrant, VRMS/IRMS responding detector circuitry Electricity 26 Active
US9111725B2 RF/VHF impedance matching, 4 quadrant, dual directional coupler with VRMS/IRMS responding detector circuitry Electricity 25 Active
US11527385B2 Systems and methods for calibrating capacitors of matching networks Electricity 7 Active
US11114279B2 Arc suppression device for plasma processing equipment Electricity 5 Active
US11657980B1 Dielectric fluid variable capacitor Electricity 5 Active
US11574799B2 Arc suppression device for plasma processing equipment Electricity 4 Active
US11107661B2 Hybrid matching network topology Electricity 4 Active
US11670488B2 Fast arc detecting match network Electricity 3 Active
US11596309B2 Hybrid matching network topology Human Necessities 3 Active
US11605527B2 Pulsing control match network Electricity 2 Active
US12051549B2 Coaxial variable capacitor Electricity 1 Active
US12132435B2 Method for repeatable stepper motor homing Electricity 1 Active
US12040139B2 Variable capacitor with linear impedance and high voltage breakdown Electricity 1 Active
US12243717B2 Variable reactance device having isolated gate drive power supplies Electricity 0 Active
US11521832B2 Uniformity control for radio frequency plasma processing systems Electricity 0 Active
US11961711B2 Radio frequency match network and generator Electricity 0 Active
US11972928B2 Method and system for plasma processing arc suppression Electricity 0 Active
US12057296B2 Electromagnetic field sensing device Electricity 0 Active
US11923175B2 Systems and methods for variable gain tuning of matching networks Electricity 0 Active
US12288673B2 Retuning for impedance matching network control Electricity 0 Active
US11896344B2 Hybrid matching network topology Human Necessities 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.