Door opener and substrate processing apparatus provided therewith
US11378337B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 23, 2020 |
| Grant date | Jul 5, 2022 |
| Priority date | — |
| Expiry date | Mar 23, 2040 |
Classification
- Technology area (CPC E)Fixed Constructions
- CPC primaryE05Y2999/00
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
The disclosure relates to a door opener to open a door of a cassette with substrates, the opener having a first wall to engage with the cassette and having a first opening to transfer the door and the substrates and a second wall opposite the first wall and having a second opening to transfer substrates. The door opener may have a closure device to hold the door of the cassette and having first and second sides and moveable in a chamber formed between the first and second wall. The opener may have a first actuator to move the closure device in a first direction from a first closing position where the first side closes against the first wall to a second closing position where the second side closes against the second wall, and from the second closing position to a transport position in between the first and second closing positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.