Patent assignee · NL · COMPANY

ASM IP Holding B.V.

1,138Patents
1,138Active
1,138Granted
67Portfolio score

Filing activity: Nov 13, 2009 → May 24, 2024 · 19 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
USD716742S1 Substrate supporter for semiconductor deposition apparatus General 579 Active
USD724553S1 Substrate supporter for semiconductor deposition apparatus General 551 Active
US9455138B1 Method for forming dielectric film in trenches by PEALD using H-containing gas Electricity 543 Active
USD665055S1 Shower plate General 537 Active
US8722546B2 Method for forming silicon-containing dielectric film by cyclic deposition with side wall coverage control Electricity 535 Active
US9005539B2 Chamber sealing member Electricity 529 Active
USD720838S1 Shower plate General 527 Active
USD743513S1 Seal ring General 527 Active
US9023737B2 Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment Electricity 525 Active
US8728832B2 Semiconductor device dielectric interface layer Electricity 522 Active
USD732644S1 Top plate General 522 Active
US9018111B2 Semiconductor reaction chamber with plasma capabilities Electricity 515 Active
US9029253B2 Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same Electricity 514 Active
US8993054B2 Method and system to reduce outgassing in a reaction chamber Chemistry; Metallurgy 514 Active
US8841182B1 Silane and borane treatments for titanium carbide films Electricity 513 Active
US9021985B2 Process gas management for an inductively-coupled plasma deposition reactor Emerging Cross-Sectional Technologies 513 Active
USD726884S1 Heater block General 512 Active
USD733261S1 Top plate General 512 Active
USD724701S1 Shower plate General 509 Active
US8535767B1 Method for repairing damage of dielectric film by hydrocarbon restoration and hydrocarbon depletion using UV irradiation Performing Operations; Transporting 508 Active
USD735836S1 Shower plate General 508 Active
USD732145S1 Shower plate General 507 Active
US9029272B1 Method for treating SiOCH film with hydrogen plasma Electricity 506 Active
US9202727B2 Susceptor heater shim Electricity 506 Active
USD733843S1 Shower plate General 504 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.