Method for producing a nanofilm, sensor arrangement comprising a nanofilm, and nanosieve comprising a nanofilm

US11378536B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Derek Debie · Bogen, DE
• Alexander Zoepfl · Regensburg, DE

Key dates

• Filing date: Jun 6, 2019
• Grant date: Jul 5, 2022
• Expiry date: May 27, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/227
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for producing a nanofilm includes providing a microsieve having a first and a second opposite surface region, wherein micropores are formed between the first and second surface regions; applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles; and creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to the wall regions of the micropores and form the nanofilm.