Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus with light emission adjuster
US11385081B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 16, 2018 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Jun 9, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D2205/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an encoder apparatus that is free from battery maintenance or has low frequency of battery maintenance. The encoder apparatus includes: a position detection system including: a scale; a light emitter that irradiates the scale with light; a light detector that changes a relative position thereof with the scale in response to movement of a mover; and a detector that detects position information on the mover based on a detection result of the light detector. The encoder apparatus also includes an electric signal generator that generates an electric signal in response to the movement of the mover; and a light emission adjuster that adjusts emission of light from the light emitter based on the electric signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.