Extraction body for lithographic apparatus
US11385547B2 · kind B2 · utility
Assignee
Inventors
- Gijs Kramer
- Martijn Houben
- Nicholas Peter Waterson
- Thibault Simon Mathieu Laurent
- Yuri Johannes Gabriël Van De Vijver
- Marcus Martinus Petrus Adrianus Vermeulen
- Simon Karel RAVENSBERGEN
- Vincentius Fransiscus CLOOSTERMAN
- Siegfried Alexander Tromp
- Coen Hubertus Matheus Baltis
- Justin Johannes Hermanus Gerritzen
- Niek Jacobus Johannes Roset
Key dates
| Filing date | May 21, 2020 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | May 21, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70733
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is configured to fluidly communicate an extraction channel in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.