Flat panel detector and manufacturing method thereof

US11387380B2 · kind B2 · utility

Assignees

• BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD. · CN
• BOE Technology Group Co., Ltd. · CN

Inventors

• Kui Liang · Beijing, CN
• Dali Liu · Beijing, CN
• Jiangbo Chen · Hangzhou City, CN
• Shuo Zhang · Oettingen, DE
• Fan Li · Beijing, CN
• Da Li · Beijing, CN

Key dates

• Filing date: Dec 24, 2019
• Grant date: Jul 12, 2022
• Expiry date: May 18, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/206

Abstract

A flat panel detector includes a base substrate, a sensing electrode and a bias electrode over the base substrate, and an insulating layer over the sensing electrode and the bias electrode at a side distal from the substrate. A difference between thicknesses of regions of the insulating layer corresponding to the sensing electrode and the bias electrode respectively is not greater than a preset threshold. When a sufficiently high voltage is applied to the insulating layer and turned on, because the thickness thereof is relatively uniform, a dark current generated by the sensing electrode and the bias electrode under the insulating layer is relatively uniform, thereby improving detection accuracy of the flat panel detector.