Dali Liu
6Patents
1h-index
34Co-inventors
51Inventor score
Filing activity: May 13, 1992 → Feb 19, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5404555A | Macro instruction set computer architecture | Physics | 23 | Expired |
| US11501976B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US9768051B2 | Wafer clamping apparatus | Electricity | 1 | Active |
| US10418250B2 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Electricity | 0 | Active |
| US11387380B2 | Flat panel detector and manufacturing method thereof | Electricity | 0 | Active |
| US11522090B2 | Flat panel detection substrate, fabricating method thereof and flat panel detector | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.