Patent · US Active

System and method for a MEMS device

US11387747B2 · kind B2 · utility

0Cited by

13References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

David Tumpold · Tauberbischofsheim, DE
Alfons Dehe · Reutlingen, DE
Christoph Glacer · Munich, DE

Key dates

Filing date	Feb 13, 2019
Grant date	Jul 12, 2022
Priority date	—
Expiry date	May 14, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.