Systems and methods for uniform target erosion magnetic assemblies
US11390520B2 · kind B2 · utility
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2References
20Claims
0Family size
Assignee
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Key dates
| Filing date | May 25, 2018 |
| Grant date | Jul 19, 2022 |
| Priority date | — |
| Expiry date | Oct 10, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/035
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In an embodiment, a system includes: a chamber; and a magnetic assembly contained within the chamber. The magnetic assembly comprises: an inner magnetic portion comprising first magnets; and an outer magnetic portion comprising second magnets. At least two adjacent magnets, of either the first magnets or the second magnets, have different vertical displacements, and the magnetic assembly is configured to rotate around an axis to generate an electromagnetic field that moves ions toward a target region within the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.