Inventor · Beijing, CN

Wen-Cheng Cheng

8Patents
1h-index
23Co-inventors
47Inventor score

Filing activity: Aug 26, 2008 → Apr 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US11322338B2 Sputter target magnet Electricity 1 Active
US11424111B2 Sputtering target assembly to prevent overetch of backing plate and methods of using the same Electricity 0 Active
US12020917B2 Sputter target magnet Electricity 0 Active
US8404135B2 Plasma cleaning for process chamber component refurbishment Chemistry; Metallurgy 0 Active
US11821316B1 System and construction method of single-layer lining tunnel structure based on mine-tunnelling method Fixed Constructions 0 Active
US11390520B2 Systems and methods for uniform target erosion magnetic assemblies Performing Operations; Transporting 0 Active
US11557470B2 Sputtering target assembly to prevent overetch of backing plate and methods of using the same Electricity 0 Active
US12091752B2 Apparatus and method of manufacturing interconnect structures Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.