Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs
US11394361B2 · kind B2 · utility
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11References
20Claims
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Key dates
| Filing date | Feb 25, 2019 |
| Grant date | Jul 19, 2022 |
| Priority date | — |
| Expiry date | May 21, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/028
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A micromechanical system (MEMS) acoustic wave resonator is formed on a base substrate. A piezoelectric member is mounted on the base substrate. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge. A first guard ring is positioned on the second electrode spaced apart from the perimeter edge of the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.