Method for controlling a processing system
US11396699B2 · kind B2 · utility
1Cited by
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8Claims
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Assignee
Inventor
Key dates
| Filing date | Aug 19, 2019 |
| Grant date | Jul 26, 2022 |
| Priority date | — |
| Expiry date | Aug 19, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/54
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.