Imprint method and article manufacturing method
US11400619B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 9, 2019 |
| Grant date | Aug 2, 2022 |
| Priority date | — |
| Expiry date | Feb 4, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2043/5875
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An imprint method includes arranging imprint material as droplets on shot region of substrate, bringing the imprint material on part of the shot region into contact with pattern region of mold and then enlarging contact region between the imprint material and the pattern region to whole region of the shot region, and curing the imprint material. in the arranging, in each of local regions located in radial direction from the part of the shot region, the imprint material is arranged such that directional drop density of the imprint material on line parallel to direction orthogonal to the radial direction and with droplets of the imprint material present thereon is smaller than that of the imprint material on line parallel to the radial direction and with droplets of the imprint material present thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.